Home Remote Sensing Gis • Analysis and Design Principles of MEMS Devices - download pdf or read online

Analysis and Design Principles of MEMS Devices - download pdf or read online

By Minhang Bao

Sensors and actuators are actually a part of our way of life and seem in lots of home equipment, equivalent to autos, merchandising machines and washing machines. MEMS (Micro Electro Mechanical platforms) are micro platforms together with micro mechanical sensors, actuators and micro digital circuits. a number of MEMS units were built and lots of mass produced, however the details on those is broadly dispersed within the literature. This publication provides the research and layout rules of MEMS units. the knowledge is accomplished, concentrating on microdynamics, equivalent to the mechanics of beam and diaphragm constructions, air damping and its impression at the movement of mechanical buildings. utilizing useful examples, the writer examines difficulties linked to research and layout, and recommendations are integrated behind the ebook. the proper complicated point textbook for graduates, Analysis and layout rules of MEMS Devices is an appropriate resource of reference for researchers and engineers within the box.

* provides the research and layout rules of MEMS units extra systematically than ever before.

* contains the theories crucial for the research and layout of MEMS contains the dynamics of micro mechanical structures

* an issue part is integrated on the finish of every bankruptcy with solutions supplied on the finish of the booklet.

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Stress and Strain 39 And the displacement of point B in the x-direction is u(x,y + dy)=u{x,y) + {-^-)dy By The line segment P'A' is now inclined against its initial direction, PA, by a small angle Y] = = — . Similarly, the line segment P'B' is inclined against PB by a dx u i u ( x , y +d y ) - u ( x , y ) du „ , . . , . , . , A _,_, . c — —— = — . 8), we have e6 —(j\ + Y2)/2. This means that the shearing strain e6=exy is a half of the angular distortion. The components e<\ and e=, have the similar geometric meaning in the YZ-plane and the XZ-plane, respectively.

Micro mechanical technology has been under development for several decades. So far a variety of MEMS devices have been developed and many of them have been massproduced. However, the analysis and design principles on MEMS devices are still widely scattered in literatures of different disciplines, such as mechanics, electrostatics, hydrodynamics, solid-state physics, microelectronics, etc. This situation is not convenient for the researchers and engineers who are developing MEMS devices and for students who are studying in this interesting area.

W=w(x), and the function is referred to as the displacement function of the beam. If the radius of curvature of the elemental section dx is OO'=r, as shown in Fig. 2, for a section of horizontal layer at the central plane (z=0), we have dx = rdQ. However, for a layer of beam away from the central plane (z^O), the material is stretched or compressed in the x-direction due to the bending deformation. The elongation of the material in the x-direction for the layer at z is A(dx)=(r+z)dQ-rdQ=zdQ. 2.

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